RESUMO

In this article nickel interdigital capacitors were fabricated on top of silicon substrates. The capacitance of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO2. An analytical solution of the capacitance was compared to electromagnetic simulations using COMSOL and with experimental measurements. Results show that modeling interdigital capacitors using Finite Element Method software such as COMSOL is effective in the design and electrical characterization of these transducers.

Assuntos

Capacitância Elétrica , Nanopartículas/química , Nanotecnologia/métodos , Animais , Bovinos , Simulação por Computador , Desenho de Equipamento , Análise Numérica Assistida por Computador , Soroalbumina Bovina/metabolismo , Eletricidade Estática